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PLD Target용 SrBi2Ta2O9의 벌크 특성에 관한 연구 = A study on bulk characteristics of SrBi2Ta2O9 for PLD target

서명/저자: PLD Target용 SrBi2Ta2O9의 벌크 특성에 관한 연구 = A study on bulk characteristics of SrBi2Ta2O9 for PLD target / 마석범 ; 조권순

초록/해제: 요약 :In this paper, composition of Sr/Bi/Ta on SrBixTa2O9+ base ceramics was changed to 1/2.4/2, 1/2.6/2, 1/2.8/2, 1/3/2, 1/3.2/2 with variation of Bi mole ratio and sintering temperature was varied also. Electrical and structural properties were investigated with respect of those variation. Finally target was made with the composition which resulted in good ferroelectric properties and was made into film by PLD process.Crystal and microscopic structures were changed with variation of volatile Bi mole ratio and appropriate composition in which Bi addition was not beyond limits of acception exhibited good ferroelectric properties. The sintering at low temperature was good for the fabrication of SBT because its electrical properties was deteriorated with raise of sintering temperature. Tetragonality was maximum value of 4.5348 and the size of grain was maximum value when composition of Sr/Bi/Ta was 1/2.8/2. At that composition, dielectric constant was maximum value of 131.63 at sintering temperature 1000℃ and remnant polarization was maximum value of 1.134(μC/cm2) at 1050℃. Target was fabricated with this composition and was made into film by PLD process. As a result, this film exhibited good ferroelectric properties and appropriate composition and sintering condition for fabrication of PLD target were found through this process.