008040525s2004 ulka 001a kor
■001304744
■00520040504141711
■020 ▼a8972833517▼g93560▼c\21000
■090 ▼a530▼b윤511ㄴ
■1001 ▼a윤영섭
■24510▼a나노 집적회로 공정기술▼xNano integrated circuit process technology▼d윤영섭 지음
■260 ▼a서울▼b홍를과학출판사▼c2004
■300 ▼a412p▼b삽도▼c26cm
■504 ▼a참고문헌 : p.405-407
■504 ▼a찾아보기 : p.409-412
■653 ▼a나노▼a집적회로▼a공정기술
■9500 ▼b\21000
■960 ▼a신이균▼b2195009